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Title: Photopolymers :
Other Titles: photoresist materials, processes, and applications /
Authors: Nakamura, Kenichiro ; (Chemical engineer), ; author. ;
Keywords: Photopolymers. ;;Photoresists. ;;Photopolymerization. ;;Photopolymers ; Industrial applications. ;;Microelectronics ; Materials. ;;QW
Year: 2015
place: Boca Raton :
Publisher: CRC Press,
Series/Report no.: Optics and photonics ; ; 10 ;
Optics and photonics (Boca Raton, Fla.) ; ; 10. ;
Abstract: "Advancements in photopolymers have led to groundbreaking achievements in electronic, optical, and medical engineering. At present, photopolymers have myriad applications in semiconductor device manufacturing, printed circuit boards (PCBs), ultraviolet (UV) curing, microelectromechanical systems (MEMS), and medical materials. Addressing topics such as chemically amplified resists, immersion lithography, extreme ultraviolet (EUV) lithography, and nanoimprinting, this book covers photopolymers from core concepts to industrial applications, providing the chemical formulae and structures of the materials discussed as well as practical case studies from some of the world's largest corporations"-- ; Provided by publisher. ;
Description: Also available in print format. ;
Print : ; Photopolymers : ; 9781466517288 (hardback) ;
URI: http://dl.kums.ac.ir/handle/Hannan/290743
ISBN: 9781466517318 (e-book : PDF) ; 9781466517288 (hardback) (Print) ;
More Information: 1 online resource : ; text file, PDF ;
Includes bibliographical references and index. ;
Appears in Collections:Microbiology and Immunology

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